Accurate Procedure to Calculate the Stress Induced by Technological Processes in the Silicon Capacitive Pressure Sensors for Biomedical Applications

Florin Gaiseanu
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Florin Gaiseanu: Science and Technology of Information Bucharest, Romania and Barcelona, Spain

Biomedical Journal of Scientific & Technical Research, 2022, vol. 43, issue 4, 34748-34753

Abstract: The silicon capacitive pressure sensors are suitable devices for the biomedical applications due to the compatibility...

Keywords: Medical Microbiology; Physical Medicine and Rehabilitation; Preventive Medicine; Regenerative Medicine; Journals on Psychology; Immunological Diseases; clinical pathology; Infectious Diseases Addiction Science; Bio-psychological Medicine; Journals on Vaccination (search for similar items in EconPapers)
Date: 2022
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Persistent link: https://EconPapers.repec.org/RePEc:abf:journl:v:43:y:2022:i:4:p:34748-34753

DOI: 10.26717/BJSTR.2022.43.006926

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