Analytical Modelling of the Boron Diffusion and Etching Process for the Accurate Design and Fabrication by Bulk Micromachining Technology of the Silicon Capacitive Pressure Sensors for Biomedical Applications

Florin Gaiseanu
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Florin Gaiseanu: Science and Technology of Information Bucharest, Romania and Barcelona, Spain

Biomedical Journal of Scientific & Technical Research, 2022, vol. 43, issue 4, 34831-34838

Abstract: The boron silicon layers doped by diffusion from non-oxidizing boron nitride – BN...

Keywords: List of Open Access Medical Journal; Journals on Medical Research; Top Medical Open Access Journal; Journals on Biomedical Science; Journals on Cancer Medicine; Open Access Journals on Surgery; Journals on Medical Drug and Therapeutics; Journals on Medical Case Reports (search for similar items in EconPapers)
Date: 2022
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Persistent link: https://EconPapers.repec.org/RePEc:abf:journl:v:43:y:2022:i:4:p:34831-34838

DOI: 10.26717/BJSTR.2022.43.006937

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