Advanced Results for the Design and Fabrication by Bulk Micromachining Technology of Silicon Capacitive Sensors for Biomedical Applications

Florin Gaiseanu
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Florin Gaiseanu: Research Professor, Science and Technology of Information Bucharest (Romania) and Barcelona (Spain), Spain

Biomedical Journal of Scientific & Technical Research, 2023, vol. 50, issue 5, 42073-42078

Abstract: In this paper are shortly presented advanced results on the design and fabrication of the silicon capacitive sensors for biomedical applications, obtained by the Bulk Micromachining (BMM) technology, based on an analytical modeling of the boron diffusion in silicon at high concentrations, suitable to describe both the boron diffusion and etching process of silicon for thin membrane achievement.

Keywords: Journals on Medical Drug and Therapeutics; Journals on Emergency Medicine; Physical Medicine and Rehabilitation; Journals on Infectious Diseases Addiction Science and Clinical Pathology; Open Access Clinical and Medical Journal; Journals on Biomedical Science; List of Open Access Medical Journal; Journals on Biomedical Engineering; Open Access Medical Journal; Biomedical Science Articles; Journal of Scientific and Technical Research (search for similar items in EconPapers)
Date: 2023
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Persistent link: https://EconPapers.repec.org/RePEc:abf:journl:v:50:y:2023:i:5:p:42073-42078

DOI: 10.26717/BJSTR.2023.50.008015

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