Characterization of Capacitance-Voltage and CurrentVoltage Behavior in TiN/Al2O3/p-Si MIS Structures
Slah Hlali,
Neila Hizem and
Adel Kalboussi
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Adel Kalboussi: Laboratory of Microelectronics and Instrumentation (LR13ES12), Faculty of Sciences of Monastir, Avenue de l’environnement, University of Monastir, Tunisia
Biomedical Journal of Scientific & Technical Research, 2024, vol. 56, issue 3, 48182-48196
Abstract:
This study investigates the electrical properties of the novel MIS structure TiN/Al2 O3/P-Si through C-V and I-V analyses, employing Silvaco TCAD software for simulation.
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Date: 2024
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Persistent link: https://EconPapers.repec.org/RePEc:abf:journl:v:56:y:2024:i:3:p:48182-48196
DOI: 10.26717/BJSTR.2024.56.008869
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