Backscattered Electrons Spectra and Angular Distributions: Simulations with EGS5

Sylvian Kahane
Additional contact information
Sylvian Kahane: retired from NRCN Israel

European Journal of Engineering and Technology Research, 2018, vol. 3, issue 10, 95-102

Abstract: The purpose of the present study is to compare numerical Monte Carlo simulations of backscattering of electrons, mainly in the keV range, with available experimental data. The final goal is to assess the ability of the Monte Carlo code to predict viable results, in view of the complexity and difficulty of performing experimental measurements. A specific code for simulating electrons backscattering was developed, based on the EGS5 electron-photon transport routines. The code was parallelized very efficiently for a common memory configuration. Simulation results for the backscattering coefficient h, the energy spectrum dh/dq, and the angle dependent energy spectrum dh/dqdW were obtained. Comparing with experiments shows agreement from very good to fair, especially in regions of high q (energy) values. For low values of q there are not experimental results due to difficulties in measurements. Hence, the Monte Carlo program can provide good estimates, in the range of energies from tens of keV up to 100-200 keV.

Keywords: Low Energy; Electron Scattering; Backscattering Coefficient; EGS5 Simulation (search for similar items in EconPapers)
Date: 2018
References: Add references at CitEc
Citations:

Downloads: (external link)
https://eu-opensci.org/index.php/ejeng/article/view/60917 Abstract page (text/html)
https://eu-opensci.org/index.php/ejeng/article/download/60917/11952 Full text (application/pdf)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:epw:ejeng0:v:3:y:2018:i:10:id:60917

DOI: 10.24018/ejeng.2018.3.10.917

Access Statistics for this article

More articles in European Journal of Engineering and Technology Research from European Open Science
Bibliographic data for series maintained by Support ().