Synthesis of Al Thin Films with High Optical Transmittance by DC Magnetron Sputtering Process Parameter Optimization

Md. Shahinur Rahman, Heon-Ju Lee, Muhammad Athar Uddin, Islam Md. Rizwanul Fattah and Md. Shafiqul Islam
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Md. Shahinur Rahman: Australian National University, Australia
Heon-Ju Lee: Jeju National University, South Korea
Muhammad Athar Uddin: International Islamic University Chittagong, Bangladesh
Islam Md. Rizwanul Fattah: University of Technology Sydney, Australia
Md. Shafiqul Islam: University of Dhaka, Bangladesh

European Journal of Engineering and Technology Research, 2023, vol. 8, issue 2, 19-25

Abstract: Nanostructured Al thin film with higher optical transmittance and electrical conductivity has intensive applications in solar cells and optical and microelectronic devices. This experimental-based research study has optimized the DC magnetron sputtering deposition parameters (sputtering power, sputtering current, voltage, and working gas pressure) for Al thin film deposition to obtain the highest optical transmittance and lower sheet resistance. Optical transmittance, surface roughness, film thickness, sheet resistance, grain size, and surface morphology were characterized using UV-vis-NIR spectroscopy, surface profiler, spectroscopic ellipsometry, four-point probe, and FE-SEM, respectively to determine the effects of sputtering process parameters on Al films’ different properties. Experimental investigations reveal that electrical conductivity, surface roughness, grain size, and deposition rate increase with increasing of sputtering power at certain working gas pressure. At the optimized condition (sputtering power 80 W, working gas pressure 5 mTorr, deposition time 5 min and ambient temperature), the relatively higher optical transmittance in visible region 96%, moderate sheet resistance 0.196 ohm/square and lowest average surface roughness 2.86 nm were obtained for Al thin film. After all, this research study will help to understand the best Al film deposition parameters in terms of optical transmittance and electrical conductivity for future research and industrial applications.

Keywords: Al Thin Film; DC Magnetron Sputtering; Optical Transmittance; Sheet Resistance; Surface Roughness (search for similar items in EconPapers)
Date: 2023
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Persistent link: https://EconPapers.repec.org/RePEc:epw:ejeng0:v:8:y:2023:i:2:id:62991

DOI: 10.24018/ejeng.2023.8.2.2991

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