Dataset of the Optimization of a Low Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis

Andrea Gaiardo, David Novel, Elia Scattolo, Alessio Bucciarelli, Pierluigi Bellutti and Giancarlo Pepponi
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Andrea Gaiardo: MNF—Micro Nano Facility, Sensors & Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy
David Novel: MNF—Micro Nano Facility, Sensors & Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy
Elia Scattolo: MNF—Micro Nano Facility, Sensors & Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy
Alessio Bucciarelli: MST—The MicroSystems Technology Research Unit, Sensors & Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy
Pierluigi Bellutti: MNF—Micro Nano Facility, Sensors & Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy
Giancarlo Pepponi: MNF—Micro Nano Facility, Sensors & Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy

Data, 2021, vol. 6, issue 3, 1-12

Abstract: Over the last few years, employment of the standard silicon microfabrication techniques for the gas sensor technology has allowed for the development of ever-small, low-cost, and low-power consumption devices. Specifically, the development of silicon microheaters (MHs) has become well established to produce MOS gas sensors. Therefore, the development of predictive models that help to define a priori the optimal design and layout of the device have become crucial, in order to achieve both low power consumption and high mechanical stability. In this research dataset, we present the experimental data collected to develop a specific and useful predictive thermal-mechanical model for high performing silicon MHs. To this aim, three MH layouts over three different membrane sizes were developed by using the standard silicon microfabrication process. Thermal and mechanical performances of the produced devices were experimentally evaluated, by using probe stations and mechanical failure analysis, respectively. The measured thermal curves were used to develop the predictive thermal model towards low power consumption. Moreover, a statistical analysis was finally introduced to cross-correlate the mechanical failure results and the thermal predictive model, aiming at MH design optimization for gas sensing applications. All the data collected in this investigation are shown.

Keywords: silicon microheaters; chemoresistive gas sensors; predictive thermal model; mechanical failure analysis; response surface method (search for similar items in EconPapers)
JEL-codes: C8 C80 C81 C82 C83 (search for similar items in EconPapers)
Date: 2021
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