Plasma–Chemical Hybrid NO x Removal in Flue Gas from Semiconductor Manufacturing Industries Using a Blade-Dielectric Barrier-Type Plasma Reactor

Haruhiko Yamasaki, Yuki Koizumi, Tomoyuki Kuroki and Masaaki Okubo
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Haruhiko Yamasaki: Department of Mechanical Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka 599-8531, Japan
Yuki Koizumi: Department of Mechanical Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka 599-8531, Japan
Tomoyuki Kuroki: Department of Mechanical Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka 599-8531, Japan
Masaaki Okubo: Department of Mechanical Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka 599-8531, Japan

Energies, 2019, vol. 12, issue 14, 1-14

Abstract: NO x is emitted in the flue gas from semiconductor manufacturing plants as a byproduct of combustion for abatement of perfluorinated compounds. In order to treat NO x emission, a combined process consisting of a dry plasma process using nonthermal plasma and a wet chemical process using a wet scrubber is performed. For the dry plasma process, a dielectric barrier discharge plasma is applied using a blade-barrier electrode. Two oxidation methods, direct and indirect, are compared in terms of NO oxidation efficiency. For the wet chemical process, sodium sulfide (Na 2 S) is used as a reducing agent for the NO 2 . Experiments are conducted by varying the gas flow rate and input power to the plasma reactor, using NO diluted in air to a level of 300 ppm to simulate exhaust gas from semiconductor manufacturing. At flow rates of ≤5 L/min, the indirect oxidation method verified greater removal efficiency than the direct oxidation method, achieving a maximum NO conversion rate of 98% and a NO x removal rate of 83% at 29.4 kV and a flow rate of 3 L/min. These results demonstrate that the proposed combined process consisting of a dry plasma process and wet chemical process is promising for treating NO x emissions from the semiconductor manufacturing industry.

Keywords: nonthermal plasma; NO x reduction; PFC; sodium sulfide; wet scrubber; blade-barrier electrode; semiconductor manufacturing (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2019
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