Structure Function Analysis of Temperature-Dependent Thermal Properties of Nm-Thin Nb 2 O 5

Lisa Mitterhuber, Elke Kraker and Stefan Defregger
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Lisa Mitterhuber: Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700 Leoben, Austria
Elke Kraker: Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700 Leoben, Austria
Stefan Defregger: Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700 Leoben, Austria

Energies, 2019, vol. 12, issue 4, 1-14

Abstract: A 166-nm-thick amorphous Niobium pentoxide layer (Nb 2 O 5 ) on a silicon substrate was investigated by using time domain thermoreflectance at ambient temperatures from 25 °C to 500 °C. In the time domain thermoreflectance measurements, thermal transients with a time resolution in (sub-)nanoseconds can be obtained by a pump-probe laser technique. The analysis of the thermal transient was carried out via the established analytical approach, but also by a numerical approach. The analytical approach showed a thermal diffusivity and thermal conductivity from 0.43 mm 2 /s to 0.74 mm 2 /s and from 1.0 W/mK to 2.3 W/mK, respectively to temperature. The used numerical approach was the structure function approach to map the measured heat path in terms of a R th C th -network. The structure function showed a decrease of R th with increasing temperature according to the increasing thermal conductivity of Nb 2 O 5 . The combination of both approaches contributes to an in-depth thermal analysis of Nb 2 O 5 film.

Keywords: thermal conductivity; niobium pentoxide; structure function; time domain thermoreflectance; thin film (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2019
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