Control Strategy for Power Conversion Systems in Plasma Generators with High Power Quality and Efficiency Considering Entire Load Conditions

Hyo Min Ahn, Eunsu Jang, Seung-Hee Ryu, Chang Seob Lim and Byoung Kuk Lee
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Hyo Min Ahn: Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Korea
Eunsu Jang: Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Korea
Seung-Hee Ryu: R&D Center, New Power Plasma, CO., LTD., Pyeongtaek 17703, Korea
Chang Seob Lim: R&D Center, New Power Plasma, CO., LTD., Pyeongtaek 17703, Korea
Byoung Kuk Lee: Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Korea

Energies, 2019, vol. 12, issue 9, 1-12

Abstract: In this paper, a control method for the power conversion system (PCS) of plasma generators connected with a plasma chamber has been presented. The PCS generates the plasma by applying a high magnitude and high frequency voltage to the injected gasses, in the chamber. With regards to the PCS, the injected gases in the chamber could be equivalent to the resistive impedance, and the equivalent impedance had a wide variable range, according to the gas pressure, amount of injected gases and the ignition state of gases in the chamber. In other words, the PCS for plasma generators should operate over a wide load range. Therefore, a control method of the PCS for plasma generators, has been proposed, to ensure stable and efficient operation in a wide load range. In addition, the validity of the proposed control method was verified by simulation and experimental results, based on an actual plasma chamber.

Keywords: plasma generator; high-frequency DC-AC inverter; input-parallel and output-series connected inverter; two-stage AC-AC converter (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2019
References: View complete reference list from CitEc
Citations: View citations in EconPapers (2)

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