Investigation of Heat Diffusion at Nanoscale Based on Thermal Analysis of Real Test Structure

Tomasz Raszkowski and Mariusz Zubert
Additional contact information
Tomasz Raszkowski: Department of Microelectronics and Computer Science, Faculty of Electrical, Electronic, Computer and Control Engineering, Lodz University of Technology, 90-924 Lodz, Poland
Mariusz Zubert: Department of Microelectronics and Computer Science, Faculty of Electrical, Electronic, Computer and Control Engineering, Lodz University of Technology, 90-924 Lodz, Poland

Energies, 2020, vol. 13, issue 9, 1-18

Abstract: This paper presents an analysis related to thermal simulation of the test structure dedicated to heat-diffusion investigation at the nanoscale. The test structure consists of thin platinum resistors mounted on wafer made of silicon dioxide. A bottom part of the structure contains the silicon layer. Simulations were carried out based on the thermal simulator prepared by the authors. Simulation results were compared with real measurement outputs yielded for the mentioned test structure. The authors also propose the Grünwald–Letnikov fractional space-derivative Dual-Phase-Lag heat transfer model as a more accurate model than the classical Fourier–Kirchhoff (F–K) heat transfer model. The approximation schema of proposed model is also proposed. The accuracy and computational properties of both numerical algorithms are presented in detail.

Keywords: Dual-Phase-Lag heat transfer model; thermal simulation algorithm; thermal measurements; Finite Difference Method scheme; Grünwald–Letnikov fractional derivative (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2020
References: View references in EconPapers View complete reference list from CitEc
Citations: View citations in EconPapers (3)

Downloads: (external link)
https://www.mdpi.com/1996-1073/13/9/2379/pdf (application/pdf)
https://www.mdpi.com/1996-1073/13/9/2379/ (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:gam:jeners:v:13:y:2020:i:9:p:2379-:d:355990

Access Statistics for this article

Energies is currently edited by Ms. Agatha Cao

More articles in Energies from MDPI
Bibliographic data for series maintained by MDPI Indexing Manager ().