Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer

Yonghyeon Kim, Hyeokjoo Choi, Seokhun Kwon, Seokwon Lee, Hyunil Kang and Wonseok Choi
Additional contact information
Yonghyeon Kim: Department of Advanced Materials Engineering, Hanbat National University, Daejeon 34158, Korea
Hyeokjoo Choi: Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea
Seokhun Kwon: Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea
Seokwon Lee: Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea
Hyunil Kang: Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea
Wonseok Choi: Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea

Energies, 2021, vol. 14, issue 11, 1-9

Abstract: This paper examines a microconstruction consisting of nickel (Ni)/chromium (Cr) alloy thin-film. The total length of the microconstruction was 28 mm, the width was 0.2 mm, and the height was designed to be 1 μm. A thin-film of Ni/Cr alloy was co-sputtered on a silicon dioxide wafer patterned with photoresist via a RF magnetron sputtering system. The RF power ratios applied to the 4 inch target of Ni and Cr were 300 W:100 W (3:1), 300 W:150 W (2:1), and 150 W:150 W (1:1). The electrical resistance of the manufactured microconstruction was calculated and measured through Hall measurements. The temperature generated by applying 1–10 V to the microconstruction electrode was observed by using an infrared camera, and was summarized using a linear equation according to the power applied to each sample.

Keywords: co-sputtering; microconstruction; RF power; nickel/chromium alloy (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2021
References: View complete reference list from CitEc
Citations: View citations in EconPapers (1)

Downloads: (external link)
https://www.mdpi.com/1996-1073/14/11/3217/pdf (application/pdf)
https://www.mdpi.com/1996-1073/14/11/3217/ (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:gam:jeners:v:14:y:2021:i:11:p:3217-:d:566336

Access Statistics for this article

Energies is currently edited by Ms. Agatha Cao

More articles in Energies from MDPI
Bibliographic data for series maintained by MDPI Indexing Manager ().