Application of Scattering Parameters to DPL Time-Lag Parameter Estimation at Nanoscale in Modern Integration Circuit Structures

Mariusz Zubert, Zbigniew Kulesza, Mariusz Jankowski and Andrzej Napieralski
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Mariusz Zubert: Department of Microelectronics and Computer Science—DMCS, Lodz University of Technology, 90-924 Lodz, Poland
Zbigniew Kulesza: Department of Microelectronics and Computer Science—DMCS, Lodz University of Technology, 90-924 Lodz, Poland
Mariusz Jankowski: Department of Microelectronics and Computer Science—DMCS, Lodz University of Technology, 90-924 Lodz, Poland
Andrzej Napieralski: Department of Microelectronics and Computer Science—DMCS, Lodz University of Technology, 90-924 Lodz, Poland

Energies, 2021, vol. 14, issue 15, 1-14

Abstract: This paper presents the methodology of material parameters’ estimation for the dual-phase-lag (DPL) model at the nanoscale in modern integration circuit (IC) structures. The analyses and measurements performed were used in the unique dedicated micro-electro-mechanical system (MEMS) test structure. The electric and thermal domain of this structure was analysed. Finally, the silicon dioxide (SiO 2 ) temperature time-lag estimation procedure is presented based on the scattering parameters measured by a vector network analyser for the considered MEMS structure together with the 2-omega method. The proposed methodology has the ability to estimate the time-lag parameter with high accuracy and is also suitable for the temperature time-lag estimation for other manufacturing process technologies of ICs and other insulation materials used for integrated circuits such as silicon nitride (Si 3 N 4 ), titanium nitride (TiN), and hafnium dioxide (HfO 2 ).

Keywords: dual-phase-lag heat transfer model; no-mesh FDM; S -parameters measurements; scattering parameters; DPL time lag estimation; multi-domain modelling; material parameter estimation; heat transfer at the nanoscale (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2021
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