Synthesis of Ultra-Thin Two-Dimensional SiC Using the CVD Method

Xu Yang, Rongzheng Liu (), Bing Liu and Malin Liu ()
Additional contact information
Xu Yang: Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing 100190, China
Rongzheng Liu: Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing 100190, China
Bing Liu: Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing 100190, China
Malin Liu: Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing 100190, China

Energies, 2022, vol. 15, issue 17, 1-8

Abstract: Two-dimensional materials have shown great potential for applications in many research areas because of their unique structures, and many 2D materials have been investigated since graphene was discovered. Ultra-thin SiC layers with thicknesses of 8–10 nm and multi-layer SiC films were designed and fabricated in this study. First, the multi-layer SiC films were obtained by the chemical vapor deposition (CVD) method with the addition of boron elements. We found that boron additives showed novel effects in the CVD process. Boron can promote the formation and crystallization of SiC films at low temperatures (1100 °C), resulting in the separation of SiC films into multi-layers with thicknesses of several nanometers. In addition, a formation mechanism for the 2D SiC layers is proposed. The boron mostly aggregated spontaneously between the thin SiC layers. Photoluminescence spectroscopy results showed that the SiC films with multi-layer structures had different bandgaps to normal SiC films. The present work proposes a potential method for fabricating 2D SiC materials with convenient experimental parameters and shows the potential of 2D SiC materials for use in electronics.

Keywords: SiC; 2D materials; boron additives; CVD (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2022
References: View complete reference list from CitEc
Citations:

Downloads: (external link)
https://www.mdpi.com/1996-1073/15/17/6351/pdf (application/pdf)
https://www.mdpi.com/1996-1073/15/17/6351/ (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:gam:jeners:v:15:y:2022:i:17:p:6351-:d:902758

Access Statistics for this article

Energies is currently edited by Ms. Agatha Cao

More articles in Energies from MDPI
Bibliographic data for series maintained by MDPI Indexing Manager ().