Theoretical and Experimental Studies of a PDMS Pneumatic Microactuator for Microfluidic Systems

Xuling Liu, Huafeng Song, Wensi Zuo, Guoyong Ye, Shaobo Jin, Liangwen Wang and Songjing Li ()
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Xuling Liu: School of Mechanical and Electronic Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
Huafeng Song: Henan Xixi Highway Construction Co., Ltd., Nanyang 474450, China
Wensi Zuo: School of Mechanical and Electronic Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
Guoyong Ye: School of Mechanical and Electronic Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
Shaobo Jin: School of Mechanical and Electronic Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
Liangwen Wang: School of Mechanical and Electronic Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
Songjing Li: Department of Fluid Control and Automation, Harbin Institute of Technology, Harbin 150001, China

Energies, 2022, vol. 15, issue 22, 1-19

Abstract: The compact, simple, and fast-reaction pneumatic microactuator is significant for the integration and high efficiency of pneumatic systems. In this work, the structure, working principle, and multiphysical model of an on-chip pneumatic microactuator are presented. The on-chip pneumatic microactuator is mainly composed of two parts: a polydimethylsiloxane (PDMS) thin membrane and an actuated chamber. The air pressure in the actuated chamber drives the thin elastic membrane to deformation. Dynamic response mathematical models of the actuated chamber for charging and exhaust with variable volume are established, and the deformation characteristics of the polydimethylsiloxane (PDMS) actuated membrane, the capacity of the actuated chamber, and the valve opening of the on-off membrane microvalve are simulated and analyzed to explore the response characteristics of the proposed pneumatic microactuator. Samples valving analysis of the on-chip membrane microvalve and mixing performance of the micromixer integrated with the pneumatic microactuator are tested to evaluate the driving capability of the pneumatic microactuator, and the results show that the response performance of the actuated time fully satisfies the needs of a pneumatic microfluidic chip for most applications.

Keywords: pneumatic microactuator; multiphysical field; mathematical model; response time; dynamic characteristics (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2022
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