Research on Magnetic Field and Force Characteristics of a Novel Four-Quadrant Lorentz Force Motor

Xiangrui Meng (), Changhong Wang, Jiapeng Zhong, Hongwei Xia, Liwei Song and Guoqing Yang
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Xiangrui Meng: Space Control and Inertial Technology Research Center, Harbin Institute of Technology, Harbin 150001, China
Changhong Wang: Space Control and Inertial Technology Research Center, Harbin Institute of Technology, Harbin 150001, China
Jiapeng Zhong: HIT (AnShan) Institute of Industrial Technology, AnShan 114000, China
Hongwei Xia: Space Control and Inertial Technology Research Center, Harbin Institute of Technology, Harbin 150001, China
Liwei Song: Institute of Electromagnetic and Electronic Technology, Harbin Institute of Technology, Harbin 150001, China
Guoqing Yang: Harbin Electric Corporation Jiamusi Electric Machine Co., Ltd., Jiamusi 154002, China

Energies, 2023, vol. 16, issue 3, 1-17

Abstract: The 6-DOF vibration isolation platform (VIP) is used to isolate vibration in the processing and manufacturing of semiconductor chips, especially electric vehicle chips. The 6-DOF VIP has the characteristics of high position accuracy, fast dynamic response, and short motion travel. In this paper, a novel four-quadrant Lorentz force motor (FQLFM) applied on the 6-DOF VIP is proposed. The structure of this LFM has a high force density, low force fluctuation, and low coupling force. First, the basic structure and operating principle of the proposed FQLFM are presented. Secondly, the expressions of the magnetic field and electromagnetic force are obtained based on an equivalent current model and the permanent magnet mirror-image method (PMMIM). Thirdly, the magnetic field and electromagnetic force characteristics of the proposed FQLFM and an LFM with a traditional bilateral structure are analyzed and compared. The relationship between the force and displacement of the FQLFM is investigated. Moreover, the PMMIM is verified by a 3D finite element analysis (FEA). Finally, the experimental platform for a force test is built and the above results are validated by an experiment.

Keywords: 6-DOF vibration isolation platform (VIP); electric vehicle chips; four-quadrant Lorentz force motor (FQLFM); magnetic field; force characteristics; permanent magnet mirror-image method (PMMIM) (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2023
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