An Electromagnetic Field Concentrator for Process Chambers

Piotr Paplicki () and Piotr Strobejko
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Piotr Paplicki: Faculty of Electrical Engineering, West Pomeranian University of Technology in Szczecin, Sikorskiego 37, 70-313 Szczecin, Poland
Piotr Strobejko: Doctoral School, West Pomeranian University of Technology in Szczecin, al. Piastów 17, 70-310 Szczecin, Poland

Energies, 2024, vol. 17, issue 22, 1-15

Abstract: This paper describes selected results of the design and optimization of an electromagnetic field concentrator (MFC) for process chambers. On the basis of 2D/3D FE analysis, it was confirmed that the presented new structure for an electromagnetic field concentrator with three-phase windings and an additional DC central coil excites, in the working space of the device, a steady or time-varying magnetic field with adjustable peak value, pulsation amplitude and vector magnetic field orientation. The presented field concentrator can be used for process chambers carrying out chemical, biological, thermal and measurement processes, among others.

Keywords: process chamber; electromagnetic excitation; magnetic field concentrator (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2024
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