Energy Efficiency Optimization of Air Conditioning Systems Towards Low-Carbon Cleanrooms: Review and Future Perspectives

Xinran Zeng, Chunhui Li (), Xiaoying Li, Chennan Mao, Zhengwei Li and Zhenhai Li ()
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Xinran Zeng: School of Mechanical Engineering, Tongji University, Shanghai 201804, China
Chunhui Li: School of Mechanical Engineering, Tongji University, Shanghai 201804, China
Xiaoying Li: School of Mechanical Engineering, Tongji University, Shanghai 201804, China
Chennan Mao: School of Mechanical Engineering, Tongji University, Shanghai 201804, China
Zhengwei Li: School of Mechanical Engineering, Tongji University, Shanghai 201804, China
Zhenhai Li: School of Mechanical Engineering, Tongji University, Shanghai 201804, China

Energies, 2025, vol. 18, issue 13, 1-37

Abstract: The advancement of high-tech industries, notably in semiconductor manufacturing, pharmaceuticals, and precision instrumentation, has imposed stringent requirements on cleanroom environments, where strict control of airborne particulates, microbial presence, temperature, and humidity is essential. However, these controlled environments incur significant energy consumption, with air conditioning systems accounting for 40–60% of total usage due to high air circulation rates, intensive treatment demands, and system resistance. In light of global carbon reduction goals and escalating energy costs, improving the energy efficiency of cleanroom heating, ventilation, and air conditioning (HVAC) systems has become a critical research priority. Recent efforts have focused on optimizing airflow distribution, integrating heat recovery technologies, and adopting low-resistance filtration to reduce energy demand while maintaining stringent environmental standards. Concurrently, artificial intelligence (AI) methods, such as machine learning, deep learning, and adaptive control, are being employed to enable intelligent, energy-efficient system operations. This review systematically examines current energy-saving technologies and strategies in cleanroom HVAC systems, assesses their real-world performance, and highlights emerging trends. The objective is to provide a scientific basis for the green design, operation, and retrofit of cleanrooms, thereby supporting the industry’s transition toward low-carbon, sustainable development.

Keywords: cleanroom air conditioning system; energy efficiency optimization; airflow management; heat recovery; low-resistance filtration; intelligent control algorithms; sustainable strategy (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2025
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