Three-Level All-SiC High-Frequency High-Voltage Plasma Power Supply System

Kaida Cai, Jing Xiao (), Zhe Yang and Ranghao Hu
Additional contact information
Kaida Cai: School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology, Guilin 541004, China
Jing Xiao: School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology, Guilin 541004, China
Zhe Yang: School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology, Guilin 541004, China
Ranghao Hu: School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology, Guilin 541004, China

Energies, 2025, vol. 18, issue 7, 1-19

Abstract: Plasma power supplies are extensively utilized in various manufacturing and medical industries. Addressing the challenges of high-voltage and high-temperature resistance in current plasma power supply systems under high-frequency conditions, this study proposes a novel design method for an all-SiC high-frequency high-voltage plasma power supply system based on a three-level topology. Firstly, the design encompasses a three-level high-frequency inverter main circuit, a three-level high-frequency control main circuit, and a high-frequency high-voltage transformer. Subsequently, a high-frequency high-voltage plasma power supply system, equipped with a rotary motor, was developed and experimentally validated. Finally, the system achieved a stable power output with a frequency of 25 kHz, an output voltage of 21.03 kV, and an output power of 13.42 kW. The experimental results demonstrate that the plasma power supply system exhibits stable output voltage and maintains an operating temperature under high-frequency and high-voltage conditions.

Keywords: three level; all SiC; high frequency; high voltage; plasma power (search for similar items in EconPapers)
JEL-codes: Q Q0 Q4 Q40 Q41 Q42 Q43 Q47 Q48 Q49 (search for similar items in EconPapers)
Date: 2025
References: Add references at CitEc
Citations:

Downloads: (external link)
https://www.mdpi.com/1996-1073/18/7/1617/pdf (application/pdf)
https://www.mdpi.com/1996-1073/18/7/1617/ (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:gam:jeners:v:18:y:2025:i:7:p:1617-:d:1619187

Access Statistics for this article

Energies is currently edited by Ms. Agatha Cao

More articles in Energies from MDPI
Bibliographic data for series maintained by MDPI Indexing Manager ().