Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles

Ayman M. Alneamy and Hassen M. Ouakad ()
Additional contact information
Ayman M. Alneamy: Department of Mechanical Engineering, Jazan University, Jazan 45142, Saudi Arabia
Hassen M. Ouakad: Renewable Energy Engineering Department, Mediterranean Institute of Technology, South Mediterranean University, les Berges du Lac 2, Tunis 1053, Tunisia

Mathematics, 2024, vol. 12, issue 7, 1-20

Abstract: The present investigation focuses on the design and mathematical modeling of a microelectromechanical (MEMS) mode-localized based sensor/actuator system. This device incorporates a sensitive clamped–clamped shallow arch microbeam with an initial curvature shaped to resemble one of the first two symmetric and asymmetric modes of free oscillations of a clamped–clamped beam. The analysis reveals that with a suitable arrangement of the initial shape of the device flexible electrode and a proper tuning of the maximum initial rise and the actuating dc load enables the transition to display certain bistable behavior. This could be a better choice to build a device with a large stroke. Furthermore, the generated data showed the occurrence of mode-veering, indicating a coupling between the concerned symmetric and asymmetric modes of vibrations, and offering the possibility for such a device to be used as a mode-localized MEMS-based sensor utilizing veering and crossing phenomena. Indeed, where a certain energy is exchanged between symmetric and asymmetric modes of a microbeam, it can be utilized to serve as a foundation for the development of a new class of highly precise resonant sensors that can capture, with a certain level of precision, any of the sensed signal amplitudes.

Keywords: microbeam; shallow arch; snap-through; mode-veering; mode-crossing (search for similar items in EconPapers)
JEL-codes: C (search for similar items in EconPapers)
Date: 2024
References: View complete reference list from CitEc
Citations:

Downloads: (external link)
https://www.mdpi.com/2227-7390/12/7/970/pdf (application/pdf)
https://www.mdpi.com/2227-7390/12/7/970/ (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:gam:jmathe:v:12:y:2024:i:7:p:970-:d:1363427

Access Statistics for this article

Mathematics is currently edited by Ms. Emma He

More articles in Mathematics from MDPI
Bibliographic data for series maintained by MDPI Indexing Manager ().