Recovering of the Membrane Profile of an Electrostatic Circular MEMS by a Three-Stage Lobatto Procedure: A Convergence Analysis in the Absence of Ghost Solutions

Mario Versaci, Giovanni Angiulli and Alessandra Jannelli
Additional contact information
Mario Versaci: Dipartimento di Ingegneria Civile Energia Ambiente e Materiali (DICEAM), Mediterranea University, Via Graziella Feo di Vito, I-89122 Reggio Calabria, Italy
Giovanni Angiulli: Dipartimento di Ingegneria dell’Informazione Infrastrutture Energia Sostenibile (DIIES), Mediterranea University, Via Graziella Feo di Vito, I-89122 Reggio Calabria, Italy
Alessandra Jannelli: Dipartimento di Scienze Matematiche e Informatiche, Scienze Fisiche e Scienze della Terra (MIFT), Messina University, Viale F. Stagno d’Alcontres, I-98166 Messina, Italy

Mathematics, 2020, vol. 8, issue 4, 1-19

Abstract: In this paper, a stable numerical approach for recovering the membrane profile of a 2D Micro-Electric-Mechanical-Systems (MEMS) is presented. Starting from a well-known 2D nonlinear second-order differential model for electrostatic circular membrane MEMS, where the amplitude of the electrostatic field is considered proportional to the mean curvature of the membrane, a collocation procedure, based on the three-stage Lobatto formula, is derived. The convergence is studied, thus obtaining the parameters operative ranges determining the areas of applicability of the device under analysis.

Keywords: electrostatic membrane MEMS devices; 2D nonlinear second order differential model; mean curvature; Lobatto’s scheme; ghost solutions (search for similar items in EconPapers)
JEL-codes: C (search for similar items in EconPapers)
Date: 2020
References: View complete reference list from CitEc
Citations: View citations in EconPapers (1)

Downloads: (external link)
https://www.mdpi.com/2227-7390/8/4/487/pdf (application/pdf)
https://www.mdpi.com/2227-7390/8/4/487/ (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:gam:jmathe:v:8:y:2020:i:4:p:487-:d:340062

Access Statistics for this article

Mathematics is currently edited by Ms. Emma He

More articles in Mathematics from MDPI
Bibliographic data for series maintained by MDPI Indexing Manager ().