A Dynamic Dispatching Method for Large-Scale Interbay Material Handling Systems of Semiconductor FAB

Beixin Xia, Tong Tian, Yan Gao, Mingyue Zhang and Yunfang Peng ()
Additional contact information
Beixin Xia: School of Management, Shanghai University, Shanghai 200444, China
Tong Tian: School of Management, Shanghai University, Shanghai 200444, China
Yan Gao: School of Communication, East China University of Political Science and Law, Shanghai 201620, China
Mingyue Zhang: School of Management, Shanghai University, Shanghai 200444, China
Yunfang Peng: School of Management, Shanghai University, Shanghai 200444, China

Sustainability, 2022, vol. 14, issue 21, 1-19

Abstract: Interbay Automated Material Handling Systems (AMHS) are widely adopted especially in Semiconductor Wafer Fabrication Systems (SWFS). The dispatching method plays a major role in the control of AMHS. This paper proposes an efficient multi-objective dynamic dispatching method which will dynamically adjust vehicle-load assignments according to the real-time situation of the system. A multi-objective cost function with variable weights is established, taking into account various performance indices (i.e., transport time, throughput, cycle time, vehicle utilization, movement, and waiting time), and the corresponding mathematical model is formulated. Then, in order to obtain the suitable weights according to the real-time condition, an advanced method is developed based on fuzzy theory. After that, a Hungarian algorithm is adopted to solve the model. Finally, simulations are conducted to validate the proposed method. The results demonstrate that it has better comprehensive performance compared to the previous dispatching methods.

Keywords: semiconductor manufacturing system; AMHS; dynamic scheduling; reassignment (search for similar items in EconPapers)
JEL-codes: O13 Q Q0 Q2 Q3 Q5 Q56 (search for similar items in EconPapers)
Date: 2022
References: View references in EconPapers View complete reference list from CitEc
Citations: View citations in EconPapers (1)

Downloads: (external link)
https://www.mdpi.com/2071-1050/14/21/13882/pdf (application/pdf)
https://www.mdpi.com/2071-1050/14/21/13882/ (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:gam:jsusta:v:14:y:2022:i:21:p:13882-:d:953197

Access Statistics for this article

Sustainability is currently edited by Ms. Alexandra Wu

More articles in Sustainability from MDPI
Bibliographic data for series maintained by MDPI Indexing Manager ().