Problems and Solution Methods of Machine Scheduling in Semiconductor Manufacturing Operations: A Survey

Jianxin Fang (), Brenda Cheang and Andrew Lim
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Jianxin Fang: International Business School, Xi’an Jiaotong-Liverpool University, Suzhou 215123, China
Brenda Cheang: Red Jasper Holdings, Westech Building, 237 Pandan Loop, Singapore 128424, Singapore
Andrew Lim: School of Computing and Artificial Intelligence, Southwest Jiaotong University, Chengdu 610032, China

Sustainability, 2023, vol. 15, issue 17, 1-44

Abstract: Machine scheduling problems associated with semiconductor manufacturing operations (SMOs) are one of the major research topics in the scheduling literature. Lots of papers have dealt with different variants of SMOs’ scheduling problems, which are generally difficult to tackle theoretically and computationally. In this paper, the single machine, parallel machines, flow shops, and job shops scheduling problems from SMOs have been reviewed, based on different processing constraints, e.g., batch processing, auxiliary resources, incompatible job families, and reentrant flow, etc., with the cycle time, flow time, and throughput-related performance measures. Given the vast and diverse nature of the current literature, it is urgently needed to make a systematic survey in order to identify the important research problems, research trends, and the progress of the related solution methods, as well as clarify future research perspectives. We hope the findings and observations could provide some insights to the researchers and practitioners in this domain.

Keywords: machine scheduling; semiconductor manufacturing; wafer production; survey (search for similar items in EconPapers)
JEL-codes: O13 Q Q0 Q2 Q3 Q5 Q56 (search for similar items in EconPapers)
Date: 2023
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