Analysis and Experiments on the Characteristics of Airflow and the Air Cleanliness Protection Region under Fan Filter Units in Cleanrooms

Hao Li (), Chen Huang, Weiqi Yi and Chao Li
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Hao Li: School of Environment and Architecture, University of Shanghai for Science and Technology, Shanghai 200093, China
Chen Huang: School of Environment and Architecture, University of Shanghai for Science and Technology, Shanghai 200093, China
Weiqi Yi: School of Environment and Architecture, University of Shanghai for Science and Technology, Shanghai 200093, China
Chao Li: School of Environment and Architecture, University of Shanghai for Science and Technology, Shanghai 200093, China

Sustainability, 2023, vol. 15, issue 17, 1-22

Abstract: Cleanrooms often utilize large amounts of supply air to achieve a required cleanliness level. To reduce the overall supply air volume, critical processes demanding the highest cleanliness requirements are suggested to be placed directly beneath the air outlet of fan filter units (FFUs). In order to determine an appropriate supply air volume, it is necessary to quantitatively analyze the particulate concentration distribution downstream of FFUs with various characteristics to determine an adequate but not excessive supply air volume. Three FFU sizes and four supply air velocities were used in this experiment, and the resulting airstream velocities, jet diffusion widths, and characteristics of particulate concentration distribution were obtained. Fitting expressions were statistically acquired based on the respective experimental data sets, which can be used to predict the airflow velocity value at any point in an FFU flow region and the width of the air cleanliness protection range.

Keywords: airflow field of FFU; particulate concentration distribution; air cleanliness protection range (search for similar items in EconPapers)
JEL-codes: O13 Q Q0 Q2 Q3 Q5 Q56 (search for similar items in EconPapers)
Date: 2023
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