Criteria of Equality of Modal Frequency of Micromechanical Gyroscopes-Accelerometers Sensitive Elements

Boris Konoplev, Igor Lysenko and Olga Ezhova

Modern Applied Science, 2015, vol. 10, issue 1, 133

Abstract: In this work the topology of the integrated micromechanical sensor of LL-type is developed. Using the condition of equality of modal frequencies of sensitive elements of the micromechanical sensor in both modes along the one axis the criterion of the coincidence is obtained, the criterion of modal frequencies of sensitive elements of the micromechanical sensor in a sense mode along the two axis is obtained, dependences of the ratio of beam length on thickness of a structural layer are showed, the results of numerical simulation of modal frequencies of the micromechanical sensor sensitive element in a drive mode or a sense mode is obtained using the criterion. Using the criterion, it is possible to achieve coincidence of intrinsic vibration frequencies of a sensitive element in a sense mode that provides the same sensitivity to the angular velocities. Coincidence of frequency of forced vibrations in a drive mode with vibration frequencies of a sense mode along both axis of sensitivity can be achieved by using electrostatic elasticity.

Date: 2015
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