Rotation of Scanner’s Mirror in MEMS Dimensions with the Use of Lorents Law

Said Farahat and Aria Nouri Jangi

Modern Applied Science, 2016, vol. 10, issue 3, 201

Abstract: In this project we study a kind of scanner in micro dimensions in which it includes three frames also the thirdframe is considered as fixed surface and the two others are including two separate coils that electric currententers it and when we expose this electric current in a magnetic field under a specific conditions then with theuse of Lorents Force law we can cause the rotation of the frame and mirror’s surface accordingly.Discussed field in this project has a magnitude of between 0.2-4 Tesla in which this magnetic field has nodestructive effect on human body also the electric current has a magnitude of between 0.001-0.14 Amper inwhich the maximum obtained rotation angle is equal to ±54.49724 that in every half cycle with the use of twoframes it can be deviated 54.49724 degree from the mirror. This plan with the lower number in coil with a designin smaller dimensions (micrometer) is simulated with a more different design and the result was acceptable so ithas been much favored for its medical capabilities.Frames are linked together with Su-8 polymer in which this polymer has been used because of its appropriatesoftness and bending.

Date: 2016
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