The Method of Spherical Surface Roughness Measurement

Xiaohui Xu and Yan Cui

Modern Applied Science, 2009, vol. 3, issue 12, 94

Abstract: The spherical surface is measured by means of Atomic Force Microscope (AFM) on nanometer scale. In order to evaluate the surface quality of this kind of three dimensional measurement, the following parameters are suggested- Ra,Rq,Ry and Tp. Some questions related to this choice are discussed in this paper.

Date: 2009
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