Etching Method for the Microstructure of LTCC

Feng Yuan

Modern Applied Science, 2010, vol. 4, issue 4, 70

Abstract: 1wt% hydrochloride acid (HCl), 2wt% hydrofluoric acid (HF), 10wt% hydro nitride acid (HNO3), and 19wt% sodium hydroxide (NaOH), were used to etch the LTCC. The SEM analysis shows that the microstructure of the LTCC A6 (Ferro) can be obtained through the etching of the 19wt% sodium hydroxide. The XRD analysis confirmed that the glass phase can be selectively removed from the glass ceramics in a 19 wt% sodium hydroxide aqueous solution at room temperature after 20 hrs.

Date: 2010
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