Experiences in implementing simulation-based support for operational decision making in semiconductor manufacturing

Ching-Hua Chen-Ritzo, Sugato Bagchi, Lindsay E. Burns and Steven C. Catlett

European Journal of Industrial Engineering, 2011, vol. 5, issue 3, 272-291

Abstract: We describe a discrete event simulator that has been deployed in a 300 mm wafer fabrication plant to aid short-term, operational decision-making. Our simulator has been designed and calibrated to produce reliable predictions over simulation horizons as short as a few days to several weeks. It has been automated to run daily, without the need for manually provided data. We provide motivating examples illustrating the need for short-term predictions, and share insights on aspects of the simulator design that contribute to its usefulness and accuracy. Finally, we include several examples of how the simulator has been used to aid operational and tactical decision-making at the IBM wafer fabrication plant in East Fishkill, NY. [Received: 01 June 2009; Revised: 16 November 2009; Accepted: 01 February 2010].

Keywords: semiconductor manufacturing; discrete-event simulation; production control; operational decision making; wafer fabrication. (search for similar items in EconPapers)
Date: 2011
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