Developing an e-service-based CAPP system for silicon surface micromanufacturing

Pingyu Jiang and Xuesong Qi

International Journal of Manufacturing Technology and Management, 2007, vol. 10, issue 4, 429-439

Abstract: In this paper, we put forward a kind of e-service-driven process-planning methodology to support the 'top-down' design flow of microcomponents. Some key enabling techniques, such as sectioning different types of layers, sequencing the 'process' flow, itemising the 'operation' set of each 'process' and generating masks, are described in detail. Moreover, a process-planning prototype is developed on the basis of Java-oriented architecture. Finally, a running example related to micromirror is presented so as to verify the above methodology and the correspondent enabling techniques.

Keywords: process planning; CAPP; micromanufacturing; e-services; rules; resource databases; mask generation; geometric reasoning; silicon surfaces; design flow; micromirrors; silicon substrate microcomponents. (search for similar items in EconPapers)
Date: 2007
References: Add references at CitEc
Citations:

Downloads: (external link)
http://www.inderscience.com/link.php?id=12158 (text/html)
Access to full text is restricted to subscribers.

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:ids:ijmtma:v:10:y:2007:i:4:p:429-439

Access Statistics for this article

More articles in International Journal of Manufacturing Technology and Management from Inderscience Enterprises Ltd
Bibliographic data for series maintained by Sarah Parker ().