Development of chemo-mechanical magnetorheological finishing process for super finishing of copper alloy

Prabhat Ranjan, R. Balasubramaniam and V.K. Suri

International Journal of Manufacturing Technology and Management, 2013, vol. 27, issue 4/5/6, 130-141

Abstract: Nano finishing is an emerging field of manufacturing science, which imparts a high level of surface smoothness, wherein surface roughness lies in range of the nanometeric scale (0.1 to 100 nm). Nano finishing is needed to improve the functional quality of various products such as biomedical implants, laser optics, etc. Recently, a hybrid finishing process viz. chemo-mechanical magnetorheological finishing (CMMRF), has been developed for single crystal silicon. This process is capable for generating sub-nanometric finish (0.5 nm) on a planner silicon surface. In this paper, CMMRF process is used to carry out super finishing of metals and alloys. The process is studied, analysed and optimised to get a better surface finish on the copper alloy and the results are compared with the results of CMMRF on silicon (monocrystalline as well as polycrystalline).

Keywords: chemo-mechanical magnetorheological finishing; CMMRF; chemo-mechanical polishing; CMP; magnetorheological finishing; MRF; diamond turn machining; DTM; computer numerical control; CNC machining; coherent correlation interferometry; CCI; carbonyl iron particles; CIP; magnetorheological polishing; MRP fluids; pH; surface roughness; surface quality; copper alloys; nanofinishing; nanotechnology; single crystal silicon; super finishing. (search for similar items in EconPapers)
Date: 2013
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