Decision making for shop floor control integration strategies in wafer fabrication using tabu search-based methodology

D.Y. Sha and Chao-Yang Liu

International Journal of Manufacturing Technology and Management, 2005, vol. 7, issue 1, 83-103

Abstract: Controlling the wafer fabrication on the shop floor is extremely difficult owing to the complicated manufacturing processes and reentrant characteristics. Hence, selecting a suitable shop floor control (SFC) strategy for wafer fabrication is very important. This paper focuses on the SFC integration strategies in wafer fabrication. Included in this research are decision problems for order review/release, dispatching and rework strategies. Unlike previous research, in which these three SFC strategies are dealt with separately, this paper will consider these three SFC strategies simultaneously. This paper proposes the tabu search-based methodology that links simulation and tabu search algorithm, used to find the better SFC integration strategies by several specific performance indicators within a reasonable computational time. From the results, this methodology was found to be outstanding for combinations of SFC strategies by different performance indicators.

Keywords: shop floor control; dispatching; order review and release; ORR; rework; wafer fabrication; tabu search algorithm; simulation; semiconductor manufacture; integration strategies; SFC strategy. (search for similar items in EconPapers)
Date: 2005
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