Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass

Frederik Kotz, Patrick Risch, Karl Arnold, Semih Sevim, Josep Puigmartí-Luis, Alexander Quick, Michael Thiel, Andrei Hrynevich, Paul D. Dalton, Dorothea Helmer and Bastian E. Rapp ()
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Frederik Kotz: University of Freiburg
Patrick Risch: University of Freiburg
Karl Arnold: University of Freiburg
Semih Sevim: ETH Zurich
Josep Puigmartí-Luis: ETH Zurich
Alexander Quick: Nanoscribe GmbH
Michael Thiel: Nanoscribe GmbH
Andrei Hrynevich: University Würzburg
Paul D. Dalton: University Würzburg
Dorothea Helmer: University of Freiburg
Bastian E. Rapp: University of Freiburg

Nature Communications, 2019, vol. 10, issue 1, 1-7

Abstract: Abstract Fused silica glass is the preferred material for applications which require long-term chemical and mechanical stability as well as excellent optical properties. The manufacturing of complex hollow microstructures within transparent fused silica glass is of particular interest for, among others, the miniaturization of chemical synthesis towards more versatile, configurable and environmentally friendly flow-through chemistry as well as high-quality optical waveguides or capillaries. However, microstructuring of such complex three-dimensional structures in glass has proven evasive due to its high thermal and chemical stability as well as mechanical hardness. Here we present an approach for the generation of hollow microstructures in fused silica glass with high precision and freedom of three-dimensional designs. The process combines the concept of sacrificial template replication with a room-temperature molding process for fused silica glass. The fabricated glass chips are versatile tools for, among other, the advance of miniaturization in chemical synthesis on chip.

Date: 2019
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DOI: 10.1038/s41467-019-09497-z

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