Full-field structured-illumination super-resolution X-ray transmission microscopy

Benedikt Günther (), Lorenz Hehn, Christoph Jud, Alexander Hipp, Martin Dierolf and Franz Pfeiffer
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Benedikt Günther: Technical University of Munich
Lorenz Hehn: Technical University of Munich
Christoph Jud: Technical University of Munich
Alexander Hipp: Helmholtz-Zentrum Geesthacht
Martin Dierolf: Technical University of Munich
Franz Pfeiffer: Technical University of Munich

Nature Communications, 2019, vol. 10, issue 1, 1-7

Abstract: Abstract Modern transmission X-ray microscopy techniques provide very high resolution at low and medium X-ray energies, but suffer from a limited field-of-view. If sub-micrometre resolution is desired, their field-of-view is typically limited to less than one millimetre. Although the field-of-view increases through combining multiple images from adjacent regions of the specimen, so does the required data acquisition time. Here, we present a method for fast full-field super-resolution transmission microscopy by structured illumination of the specimen. This technique is well-suited even for hard X-ray energies above 30 keV, where efficient optics are hard to obtain. Accordingly, investigation of optically thick specimen becomes possible with our method combining a wide field-of-view spanning multiple millimetres, or even centimetres, with sub-micron resolution and hard X-ray energies.

Date: 2019
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DOI: 10.1038/s41467-019-10537-x

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