Magnetic origami creates high performance micro devices

Felix Gabler, Dmitriy D. Karnaushenko, Daniil Karnaushenko () and Oliver G. Schmidt ()
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Felix Gabler: Leibniz IFW Dresden
Dmitriy D. Karnaushenko: Leibniz IFW Dresden
Daniil Karnaushenko: Leibniz IFW Dresden
Oliver G. Schmidt: Leibniz IFW Dresden

Nature Communications, 2019, vol. 10, issue 1, 1-10

Abstract: Abstract Self-assembly of two-dimensional patterned nanomembranes into three-dimensional micro-architectures has been considered a powerful approach for parallel and scalable manufacturing of the next generation of micro-electronic devices. However, the formation pathway towards the final geometry into which two-dimensional nanomembranes can transform depends on many available degrees of freedom and is plagued by structural inaccuracies. Especially for high-aspect-ratio nanomembranes, the potential energy landscape gives way to a manifold of complex pathways towards misassembly. Therefore, the self-assembly yield and device quality remain low and cannot compete with state-of-the art technologies. Here we present an alternative approach for the assembly of high-aspect-ratio nanomembranes into microelectronic devices with unprecedented control by remotely programming their assembly behavior under the influence of external magnetic fields. This form of magnetic Origami creates micro energy storage devices with excellent performance and high yield unleashing the full potential of magnetic field assisted assembly for on-chip manufacturing processes.

Date: 2019
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DOI: 10.1038/s41467-019-10947-x

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