An ultrahigh resolution pressure sensor based on percolative metal nanoparticle arrays

Minrui Chen, Weifeng Luo, Zhongqi Xu, Xueping Zhang, Bo Xie (), Guanghou Wang and Min Han ()
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Minrui Chen: Nanjing University
Weifeng Luo: Nanjing University
Zhongqi Xu: Nanjing University
Xueping Zhang: Nanjing University
Bo Xie: Huibei Normal University
Guanghou Wang: Nanjing University
Min Han: Nanjing University

Nature Communications, 2019, vol. 10, issue 1, 1-9

Abstract: Abstract Tunneling conductance among nanoparticle arrays is extremely sensitive to the spacing of nanoparticles and might be applied to fabricate ultra-sensitive sensors. Such sensors are of paramount significance for various application, such as automotive systems and consumer electronics. Here, we represent a sensitive pressure sensor which is composed of a piezoresistive strain transducer fabricated from closely spaced nanoparticle films deposited on a flexible membrane. Benefited from this unique quantum transport mechanism, the thermal noise of the sensor decreases significantly, providing the opportunity for our devices to serve as high-performance pressure sensors with an ultrahigh resolution as fine as about 0.5 Pa and a high sensitivity of 0.13 kPa−1. Moreover, our sensor with such an unprecedented response capability can be operated as a barometric altimeter with an altitude resolution of about 1 m. The outstanding behaviors of our devices make nanoparticle arrays for use as actuation materials for pressure measurement.

Date: 2019
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DOI: 10.1038/s41467-019-12030-x

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