Surface acoustic wave photonic devices in silicon on insulator

Dvir Munk, Moshe Katzman, Mirit Hen, Maayan Priel, Moshe Feldberg, Tali Sharabani, Shahar Levy, Arik Bergman and Avi Zadok ()
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Dvir Munk: Bar-Ilan University
Moshe Katzman: Bar-Ilan University
Mirit Hen: Bar-Ilan University
Maayan Priel: Bar-Ilan University
Moshe Feldberg: Bar-Ilan University
Tali Sharabani: Bar-Ilan University
Shahar Levy: Bar-Ilan University
Arik Bergman: Bar-Ilan University
Avi Zadok: Bar-Ilan University

Nature Communications, 2019, vol. 10, issue 1, 1-9

Abstract: Abstract Opto-mechanical interactions in planar photonic integrated circuits draw great interest in basic research and applications. However, opto-mechanics is practically absent in the most technologically significant photonics platform: silicon on insulator. Previous demonstrations required the under-etching and suspension of silicon structures. Here we present surface acoustic wave-photonic devices in silicon on insulator, up to 8 GHz frequency. Surface waves are launched through absorption of modulated pump light in metallic gratings and thermo-elastic expansion. The surface waves are detected through photo-elastic modulation of an optical probe in standard race-track resonators. Devices do not involve piezo-electric actuation, suspension of waveguides or hybrid material integration. Wavelength conversion of incident microwave signals and acoustic true time delays up to 40 ns are demonstrated on-chip. Lastly, discrete-time microwave-photonic filters with up to six taps and 20 MHz-wide passbands are realized using acoustic delays. The concept is suitable for integrated microwave-photonics signal processing.

Date: 2019
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DOI: 10.1038/s41467-019-12157-x

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