Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators

Xin Zhou, Chun Zhao, Dingbang Xiao (), Jiangkun Sun, Guillermo Sobreviela, Dustin D. Gerrard, Yunhan Chen, Ian Flader, Thomas W. Kenny, Xuezhong Wu and Ashwin A. Seshia ()
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Xin Zhou: University of Cambridge
Chun Zhao: University of Cambridge
Dingbang Xiao: National University of Defense Technology
Jiangkun Sun: University of Cambridge
Guillermo Sobreviela: University of Cambridge
Dustin D. Gerrard: Stanford University
Yunhan Chen: Stanford University
Ian Flader: Stanford University
Thomas W. Kenny: Stanford University
Xuezhong Wu: National University of Defense Technology
Ashwin A. Seshia: University of Cambridge

Nature Communications, 2019, vol. 10, issue 1, 1-9

Abstract: Abstract Understanding and controlling modal coupling in micro/nanomechanical devices is integral to the design of high-accuracy timing references and inertial sensors. However, insight into specific physical mechanisms underlying modal coupling, and the ability to tune such interactions is limited. Here, we demonstrate that tuneable mode coupling can be achieved in capacitive microelectromechanical devices with dynamic electrostatic fields enabling strong coupling between otherwise uncoupled modes. A vacuum-sealed microelectromechanical silicon ring resonator is employed in this work, with relevance to the gyroscopic lateral modes of vibration. It is shown that a parametric pumping scheme can be implemented through capacitive electrodes surrounding the device that allows for the mode coupling strength to be dynamically tuned, as well as allowing greater flexibility in the control of the coupling stiffness. Electrostatic pump based sideband coupling is demonstrated, and compared to conventional strain-mediated sideband operations. Electrostatic coupling is shown to be very efficient, enabling strong, tunable dynamical coupling.

Date: 2019
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DOI: 10.1038/s41467-019-12796-0

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