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Graded intrafillable architecture-based iontronic pressure sensor with ultra-broad-range high sensitivity

Ningning Bai, Liu Wang, Qi Wang, Jue Deng, Yan Wang, Peng Lu, Jun Huang, Gang Li, Yuan Zhang, Junlong Yang, Kewei Xie, Xuanhe Zhao and Chuan Fei Guo ()
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Ningning Bai: Southern University of Science and Technology
Liu Wang: Southern University of Science and Technology
Qi Wang: Southern University of Science and Technology
Jue Deng: Southern University of Science and Technology
Yan Wang: Southern University of Science and Technology
Peng Lu: Southern University of Science and Technology
Jun Huang: Southern University of Science and Technology
Gang Li: Southern University of Science and Technology
Yuan Zhang: Southern University of Science and Technology
Junlong Yang: Southern University of Science and Technology
Kewei Xie: Southern University of Science and Technology
Xuanhe Zhao: Massachusetts Institute of Technology
Chuan Fei Guo: Southern University of Science and Technology

Nature Communications, 2020, vol. 11, issue 1, 1-9

Abstract: Abstract Sensitivity is a crucial parameter for flexible pressure sensors and electronic skins. While introducing microstructures (e.g., micro-pyramids) can effectively improve the sensitivity, it in turn leads to a limited pressure-response range due to the poor structural compressibility. Here, we report a strategy of engineering intrafillable microstructures that can significantly boost the sensitivity while simultaneously broadening the pressure responding range. Such intrafillable microstructures feature undercuts and grooves that accommodate deformed surface microstructures, effectively enhancing the structural compressibility and the pressure-response range. The intrafillable iontronic sensor exhibits an unprecedentedly high sensitivity (Smin > 220 kPa−1) over a broad pressure regime (0.08 Pa-360 kPa), and an ultrahigh pressure resolution (18 Pa or 0.0056%) over the full pressure range, together with remarkable mechanical stability. The intrafillable structure is a general design expected to be applied to other types of sensors to achieve a broader pressure-response range and a higher sensitivity.

Date: 2020
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DOI: 10.1038/s41467-019-14054-9

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