Toward three-dimensional hybrid inorganic/organic optoelectronics based on GaN/oCVD-PEDOT structures

Linus Krieg, Florian Meierhofer, Sascha Gorny, Stefan Leis, Daniel Splith, Zhipeng Zhang, Holger Wenckstern, Marius Grundmann, Xiaoxue Wang, Jana Hartmann, Christoph Margenfeld, Irene Manglano Clavero, Adrian Avramescu, Tilman Schimpke, Dominik Scholz, Hans-Jürgen Lugauer, Martin Strassburg, Jörgen Jungclaus, Steffen Bornemann, Hendrik Spende, Andreas Waag, Karen K. Gleason and Tobias Voss ()
Additional contact information
Linus Krieg: Technische Universität Braunschweig
Florian Meierhofer: Technische Universität Braunschweig
Sascha Gorny: Technische Universität Braunschweig
Stefan Leis: Technische Universität Braunschweig
Daniel Splith: Universität Leipzig
Zhipeng Zhang: Universität Leipzig
Holger Wenckstern: Universität Leipzig
Marius Grundmann: Universität Leipzig
Xiaoxue Wang: Massachusetts Institute of Technology
Jana Hartmann: Technische Universität Braunschweig
Christoph Margenfeld: Technische Universität Braunschweig
Irene Manglano Clavero: Technische Universität Braunschweig
Adrian Avramescu: OSRAM Opto Semiconductors GmbH
Tilman Schimpke: OSRAM Opto Semiconductors GmbH
Dominik Scholz: OSRAM Opto Semiconductors GmbH
Hans-Jürgen Lugauer: OSRAM Opto Semiconductors GmbH
Martin Strassburg: OSRAM Opto Semiconductors GmbH
Jörgen Jungclaus: Technische Universität Braunschweig
Steffen Bornemann: Technische Universität Braunschweig
Hendrik Spende: Technische Universität Braunschweig
Andreas Waag: Technische Universität Braunschweig
Karen K. Gleason: Massachusetts Institute of Technology
Tobias Voss: Technische Universität Braunschweig

Nature Communications, 2020, vol. 11, issue 1, 1-10

Abstract: Abstract The combination of inorganic semiconductors with organic thin films promises new strategies for the realization of complex hybrid optoelectronic devices. Oxidative chemical vapor deposition (oCVD) of conductive polymers offers a flexible and scalable path towards high-quality three-dimensional inorganic/organic optoelectronic structures. Here, hole-conductive poly(3,4-ethylenedioxythiophene) (PEDOT) grown by oxidative chemical vapor deposition is used to fabricate transparent and conformal wrap-around p-type contacts on three-dimensional microLEDs with large aspect ratios, a yet unsolved challenge in three-dimensional gallium nitride technology. The electrical characteristics of two-dimensional reference structures confirm the quasi-metallic state of the polymer, show high rectification ratios, and exhibit excellent thermal and temporal stability. We analyze the electroluminescence from a three-dimensional hybrid microrod/polymer LED array and demonstrate its improved optical properties compared with a purely inorganic microrod LED. The findings highlight a way towards the fabrication of hybrid three-dimensional optoelectronics on the sub-micron scale.

Date: 2020
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DOI: 10.1038/s41467-020-18914-7

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