Electromechanically reconfigurable optical nano-kirigami

Shanshan Chen, Zhiguang Liu, Huifeng Du, Chengchun Tang, Chang-Yin Ji, Baogang Quan, Ruhao Pan, Lechen Yang, Xinhao Li, Changzhi Gu, Xiangdong Zhang, Yugui Yao, Junjie Li (), Nicholas X. Fang () and Jiafang Li ()
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Shanshan Chen: Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology
Zhiguang Liu: Chinese Academy of Sciences
Huifeng Du: Massachusetts Institute of Technology
Chengchun Tang: Chinese Academy of Sciences
Chang-Yin Ji: Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology
Baogang Quan: Chinese Academy of Sciences
Ruhao Pan: Chinese Academy of Sciences
Lechen Yang: Chinese Academy of Sciences
Xinhao Li: Massachusetts Institute of Technology
Changzhi Gu: Chinese Academy of Sciences
Xiangdong Zhang: Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology
Yugui Yao: Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology
Junjie Li: Chinese Academy of Sciences
Nicholas X. Fang: Massachusetts Institute of Technology
Jiafang Li: Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology

Nature Communications, 2021, vol. 12, issue 1, 1-8

Abstract: Abstract Kirigami, with facile and automated fashion of three-dimensional (3D) transformations, offers an unconventional approach for realizing cutting-edge optical nano-electromechanical systems. Here, we demonstrate an on-chip and electromechanically reconfigurable nano-kirigami with optical functionalities. The nano-electromechanical system is built on an Au/SiO2/Si substrate and operated via attractive electrostatic forces between the top gold nanostructure and bottom silicon substrate. Large-range nano-kirigami like 3D deformations are clearly observed and reversibly engineered, with scalable pitch size down to 0.975 μm. Broadband nonresonant and narrowband resonant optical reconfigurations are achieved at visible and near-infrared wavelengths, respectively, with a high modulation contrast up to 494%. On-chip modulation of optical helicity is further demonstrated in submicron nano-kirigami at near-infrared wavelengths. Such small-size and high-contrast reconfigurable optical nano-kirigami provides advanced methodologies and platforms for versatile on-chip manipulation of light at nanoscale.

Date: 2021
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DOI: 10.1038/s41467-021-21565-x

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