Heterogeneous integration of single-crystalline rutile nanomembranes with steep phase transition on silicon substrates

Dong Kyu Lee, Yunkyu Park, Hyeji Sim, Jinheon Park, Younghak Kim, Gi-Yeop Kim, Chang-Beom Eom, Si-Young Choi () and Junwoo Son ()
Additional contact information
Dong Kyu Lee: Pohang University of Science and Technology (POSTECH)
Yunkyu Park: Pohang University of Science and Technology (POSTECH)
Hyeji Sim: Pohang University of Science and Technology (POSTECH)
Jinheon Park: Pohang University of Science and Technology (POSTECH)
Younghak Kim: Pohang Accelerator Laboratory
Gi-Yeop Kim: Pohang University of Science and Technology (POSTECH)
Chang-Beom Eom: University of Wisconsin-Madison
Si-Young Choi: Pohang University of Science and Technology (POSTECH)
Junwoo Son: Pohang University of Science and Technology (POSTECH)

Nature Communications, 2021, vol. 12, issue 1, 1-8

Abstract: Abstract Unrestricted integration of single-crystal oxide films on arbitrary substrates has been of great interest to exploit emerging phenomena from transition metal oxides for practical applications. Here, we demonstrate the release and transfer of a freestanding single-crystalline rutile oxide nanomembranes to serve as an epitaxial template for heterogeneous integration of correlated oxides on dissimilar substrates. By selective oxidation and dissolution of sacrificial VO2 buffer layers from TiO2/VO2/TiO2 by H2O2, millimeter-size TiO2 single-crystalline layers are integrated on silicon without any deterioration. After subsequent VO2 epitaxial growth on the transferred TiO2 nanomembranes, we create artificial single-crystalline oxide/Si heterostructures with excellent sharpness of metal-insulator transition ( $$\triangle \rho /\rho$$ △ ρ / ρ > 103) even in ultrathin (

Date: 2021
References: Add references at CitEc
Citations: View citations in EconPapers (1)

Downloads: (external link)
https://www.nature.com/articles/s41467-021-24740-2 Abstract (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:nat:natcom:v:12:y:2021:i:1:d:10.1038_s41467-021-24740-2

Ordering information: This journal article can be ordered from
https://www.nature.com/ncomms/

DOI: 10.1038/s41467-021-24740-2

Access Statistics for this article

Nature Communications is currently edited by Nathalie Le Bot, Enda Bergin and Fiona Gillespie

More articles in Nature Communications from Nature
Bibliographic data for series maintained by Sonal Shukla () and Springer Nature Abstracting and Indexing ().