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Angle-based wavefront sensing enabled by the near fields of flat optics

Soongyu Yi, Jin Xiang, Ming Zhou, Zhicheng Wu, Lan Yang and Zongfu Yu ()
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Soongyu Yi: University of Wisconsin-Madison
Jin Xiang: University of Wisconsin-Madison
Ming Zhou: University of Wisconsin-Madison
Zhicheng Wu: University of Wisconsin-Madison
Lan Yang: Washington University in St. Louis
Zongfu Yu: University of Wisconsin-Madison

Nature Communications, 2021, vol. 12, issue 1, 1-8

Abstract: Abstract There is a long history of using angle sensors to measure wavefront. The best example is the Shack-Hartmann sensor. Compared to other methods of wavefront sensing, angle-based approach is more broadly used in industrial applications and scientific research. Its wide adoption is attributed to its fully integrated setup, robustness, and fast speed. However, there is a long-standing issue in its low spatial resolution, which is limited by the size of the angle sensor. Here we report a angle-based wavefront sensor to overcome this challenge. It uses ultra-compact angle sensor built from flat optics. It is directly integrated on focal plane array. This wavefront sensor inherits all the benefits of the angle-based method. Moreover, it improves the spatial sampling density by over two orders of magnitude. The drastically improved resolution allows angle-based sensors to be used for quantitative phase imaging, enabling capabilities such as video-frame recording of high-resolution surface topography.

Date: 2021
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DOI: 10.1038/s41467-021-26169-z

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