Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators

Stefano Stassi (), Ido Cooperstein, Mauro Tortello, Candido Fabrizio Pirri, Shlomo Magdassi () and Carlo Ricciardi
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Stefano Stassi: Politecnico di Torino
Ido Cooperstein: Casali Center for Applied Chemistry, Institute of Chemistry, The Hebrew University of Jerusalem
Mauro Tortello: Politecnico di Torino
Candido Fabrizio Pirri: Politecnico di Torino
Shlomo Magdassi: Casali Center for Applied Chemistry, Institute of Chemistry, The Hebrew University of Jerusalem
Carlo Ricciardi: Politecnico di Torino

Nature Communications, 2021, vol. 12, issue 1, 1-9

Abstract: Abstract The extreme miniaturization in NEMS resonators offers the possibility to reach an unprecedented resolution in high-performance mass sensing. These very low limits of detection are related to the combination of two factors: a small resonator mass and a high quality factor. The main drawback of NEMS is represented by the highly complex, multi-steps, and expensive fabrication processes. Several alternatives fabrication processes have been exploited, but they are still limited to MEMS range and very low-quality factor. Here we report the fabrication of rigid NEMS resonators with high-quality factors by a 3D printing approach. After a thermal step, we reach complex geometry printed devices composed of ceramic structures with high Young’s modulus and low damping showing performances in line with silicon-based NEMS resonators ones. We demonstrate the possibility of rapid fabrication of NEMS devices that present an effective alternative to semiconducting resonators as highly sensitive mass and force sensors.

Date: 2021
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DOI: 10.1038/s41467-021-26353-1

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