Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems

Jun Kyu Park, Yue Zhang, Baoxing Xu and Seok Kim ()
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Jun Kyu Park: University of Illinois at Urbana-Champaign
Yue Zhang: University of Virginia
Baoxing Xu: University of Virginia
Seok Kim: University of Illinois at Urbana-Champaign

Nature Communications, 2021, vol. 12, issue 1, 1-10

Abstract: Abstract Direct transfer of pre-patterned device-grade nano-to-microscale materials highly benefits many existing and potential, high performance, heterogeneously integrated functional systems over conventional lithography-based microfabrication. We present, in combined theory and experiment, a self-delamination-driven pattern transfer of a single crystalline silicon thin membrane via well-controlled interfacial design in liquid media. This pattern transfer allows the usage of an intermediate or mediator substrate where both front and back sides of a thin membrane are capable of being integrated with standard lithographical processing, thereby achieving deterministic assembly of the thin membrane into a multi-functional system. Implementations of these capabilities are demonstrated in broad variety of applications ranging from electronics to microelectromechanical systems, wetting and filtration, and metamaterials.

Date: 2021
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DOI: 10.1038/s41467-021-27208-5

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