Robust growth of two-dimensional metal dichalcogenides and their alloys by active chalcogen monomer supply

Yonggang Zuo, Can Liu (), Liping Ding, Ruixi Qiao, Jinpeng Tian, Chang Liu, Qinghe Wang, Guodong Xue, Yilong You, Quanlin Guo, Jinhuan Wang, Ying Fu, Kehai Liu, Xu Zhou, Hao Hong, Muhong Wu, Xiaobo Lu, Rong Yang, Guangyu Zhang, Dapeng Yu, Enge Wang, Xuedong Bai (), Feng Ding () and Kaihui Liu ()
Additional contact information
Yonggang Zuo: Peking University
Can Liu: Peking University
Liping Ding: Institute for Basic Science
Ruixi Qiao: Peking University
Jinpeng Tian: Institute of Physics, Chinese Academy of Sciences
Chang Liu: Peking University
Qinghe Wang: Peking University
Guodong Xue: Peking University
Yilong You: Peking University
Quanlin Guo: Peking University
Jinhuan Wang: Peking University
Ying Fu: Songshan Lake Materials Laboratory
Kehai Liu: Songshan Lake Materials Laboratory
Xu Zhou: South China Normal University, Guangzhou
Hao Hong: Peking University
Muhong Wu: Peking University
Xiaobo Lu: Peking University
Rong Yang: Institute of Physics, Chinese Academy of Sciences
Guangyu Zhang: Institute of Physics, Chinese Academy of Sciences
Dapeng Yu: Shenzhen Institute for Quantum Science and Engineering, Southern University of Science and Technology
Enge Wang: Peking University
Xuedong Bai: Institute of Physics, Chinese Academy of Sciences
Feng Ding: Institute for Basic Science
Kaihui Liu: Peking University

Nature Communications, 2022, vol. 13, issue 1, 1-7

Abstract: Abstract The precise precursor supply is a precondition for controllable growth of two-dimensional (2D) transition metal dichalcogenides (TMDs). Although great efforts have been devoted to modulating the transition metal supply, few effective methods of chalcogen feeding control were developed. Here we report a strategy of using active chalcogen monomer supply to grow high-quality TMDs in a robust and controllable manner, e.g., MoS2 monolayers perform representative photoluminescent circular helicity of ~92% and electronic mobility of ~42 cm2V−1s−1. Meanwhile, a uniform quaternary TMD alloy with three different anions, i.e., MoS2(1-x-y)Se2xTe2y, was accomplished. Our mechanism study revealed that the active chalcogen monomers can bind and diffuse freely on a TMD surface, which enables the effective nucleation, reaction, vacancy healing and alloy formation during the growth. Our work offers a degree of freedom for the controllable synthesis of 2D compounds and their alloys, benefiting the development of high-end devices with desired 2D materials.

Date: 2022
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DOI: 10.1038/s41467-022-28628-7

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