Real-time nanomechanical property modulation as a framework for tunable NEMS

Utku Emre Ali, Gaurav Modi, Ritesh Agarwal and Harish Bhaskaran ()
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Utku Emre Ali: University of Oxford
Gaurav Modi: University of Pennsylvania
Ritesh Agarwal: University of Pennsylvania
Harish Bhaskaran: University of Oxford

Nature Communications, 2022, vol. 13, issue 1, 1-8

Abstract: Abstract Phase-change materials (PCMs) can switch between amorphous and crystalline states permanently yet reversibly. However, the change in their mechanical properties has largely gone unexploited. The most practical configuration using suspended thin-films suffer from filamentation and melt-quenching. Here, we overcome these limitations using nanowires as active nanoelectromechanical systems (NEMS). We achieve active modulation of the Young’s modulus in GeTe nanowires by exploiting a unique dislocation-based route for amorphization. These nanowire NEMS enable power-free tuning of the resonance frequency over a range of 30%. Furthermore, their high quality factors ( $$Q$$ Q > 104) are retained after phase transformation. We utilize their intrinsic piezoresistivity with unprecedented gauge factors (up to 1100) to facilitate monolithic integration. Our NEMS demonstrate real-time frequency tuning in a frequency-hopping spread spectrum radio prototype. This work not only opens up an entirely new area of phase-change NEMS but also provides a novel framework for utilizing functional nanowires in active mechanical systems.

Date: 2022
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DOI: 10.1038/s41467-022-29117-7

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