Integrated silicon carbide electro-optic modulator

Keith Powell, Liwei Li, Amirhassan Shams-Ansari, Jianfu Wang, Debin Meng, Neil Sinclair, Jiangdong Deng, Marko Lončar () and Xiaoke Yi ()
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Keith Powell: The University of Sydney
Liwei Li: The University of Sydney
Amirhassan Shams-Ansari: Harvard University
Jianfu Wang: The University of Sydney
Debin Meng: The University of Sydney
Neil Sinclair: Harvard University
Jiangdong Deng: Harvard University
Marko Lončar: Harvard University
Xiaoke Yi: The University of Sydney

Nature Communications, 2022, vol. 13, issue 1, 1-7

Abstract: Abstract Owing to its attractive optical and electronic properties, silicon carbide is an emerging platform for integrated photonics. However an integral component of the platform is missing—an electro-optic modulator, a device which encodes electrical signals onto light. As a non-centrosymmetric crystal, silicon carbide exhibits the Pockels effect, yet a modulator has not been realized since the discovery of this effect more than three decades ago. Here we design, fabricate, and demonstrate a Pockels modulator in silicon carbide. Specifically, we realize a waveguide-integrated, small form-factor, gigahertz-bandwidth modulator that operates using complementary metal-oxide-semiconductor (CMOS)-level voltages on a thin film of silicon carbide on insulator. Our device is fabricated using a CMOS foundry compatible fabrication process and features no signal degradation, no presence of photorefractive effects, and stable operation at high optical intensities (913 kW/mm2), allowing for high optical signal-to-noise ratios for modern communications. Our work unites Pockels electro-optics with a CMOS foundry compatible platform in silicon carbide.

Date: 2022
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DOI: 10.1038/s41467-022-29448-5

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