Quantum dot-integrated GaN light-emitting diodes with resolution beyond the retinal limit

Junho Bae, Yuseop Shin, Hyungyu Yoo, Yongsu Choi, Jinho Lim, Dasom Jeon, Ilsoo Kim, Myungsoo Han and Seunghyun Lee ()
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Junho Bae: Kyung Hee University
Yuseop Shin: Kyung Hee University
Hyungyu Yoo: Kyung Hee University
Yongsu Choi: Kyung Hee University
Jinho Lim: Kyung Hee University
Dasom Jeon: Kyung Hee University
Ilsoo Kim: LG Display Research and Development Center
Myungsoo Han: LG Display Research and Development Center
Seunghyun Lee: Kyung Hee University

Nature Communications, 2022, vol. 13, issue 1, 1-9

Abstract: Abstract Near-eye display technology is a rapidly growing field owing to the recent emergence of augmented and mixed reality. Ultrafast response time, high resolution, high luminance, and a dynamic range for outdoor use are all important for non-pixelated, pupil-forming optics. The current mainstream technologies using liquid crystals and organic materials cannot satisfy all these conditions. Thus, finely patterned light-emissive solid-state devices with integrated circuits are often proposed to meet these requirements. In this study, we integrated several advanced technologies to design a prototype microscale light-emitting diode (LED) arrays using quantum dot (QD)-based color conversion. Wafer-scale epilayer transfer and the bond-before-pattern technique were used to directly integrate 5-µm-scale GaN LED arrays on a foreign silicon substrate. Notably, the lithography-level alignment with the bottom wafer opens up the possibility for ultrafast operation with circuit integration. Spectrally pure color conversion and solvent-free QD patterning were also achieved using an elastomeric topographical mask. Self-assembled monolayers were applied to selectively alter the surface wettability for a completely dry process. The final emissive-type LED array integrating QD, GaN, and silicon technology resulted in a 1270 PPI resolution that is far beyond the retinal limit.

Date: 2022
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DOI: 10.1038/s41467-022-29538-4

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