Creating three-dimensional magnetic functional microdevices via molding-integrated direct laser writing

Zemin Liu, Meng Li, Xiaoguang Dong, Ziyu Ren, Wenqi Hu () and Metin Sitti ()
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Zemin Liu: Max Planck Institute for Intelligent Systems, Stuttgart
Meng Li: Max Planck Institute for Intelligent Systems, Stuttgart
Xiaoguang Dong: Max Planck Institute for Intelligent Systems, Stuttgart
Ziyu Ren: Max Planck Institute for Intelligent Systems, Stuttgart
Wenqi Hu: Max Planck Institute for Intelligent Systems, Stuttgart
Metin Sitti: Max Planck Institute for Intelligent Systems, Stuttgart

Nature Communications, 2022, vol. 13, issue 1, 1-11

Abstract: Abstract Magnetically driven wireless miniature devices have become promising recently in healthcare, information technology, and many other fields. However, they lack advanced fabrication methods to go down to micrometer length scales with heterogeneous functional materials, complex three-dimensional (3D) geometries, and 3D programmable magnetization profiles. To fill this gap, we propose a molding-integrated direct laser writing-based microfabrication approach in this study and showcase its advanced enabling capabilities with various proof-of-concept functional microdevice prototypes. Unique motions and functionalities, such as metachronal coordinated motion, fluid mixing, function reprogramming, geometrical reconfiguring, multiple degrees-of-freedom rotation, and wireless stiffness tuning are exemplary demonstrations of the versatility of this fabrication method. Such facile fabrication strategy can be applied toward building next-generation smart microsystems in healthcare, robotics, metamaterials, microfluidics, and programmable matter.

Date: 2022
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DOI: 10.1038/s41467-022-29645-2

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